The Physics of Microfabrication formatIsbn:Hardcover - 9780306408632 Wesentlicher Bestandteil dabei ist die

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The Physics of Microfabrication formatIsbn:Hardcover - 9780306408632 Wesentlicher Bestandteil dabei ist dieThe Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of